Test temperature: -50~90℃, LN2 cooling
2 Axis Position/Rate table
Inner Axis rate 0 to ±1000 °/s,
Outer Axis rate 0 to ± 200 °/s
Inner Axis acceleration 300 deg/sec2
Outer axis acceleration 150 deg/sec2
Rate stability: both axes，0.01%
Position accuracy (both axes) ：30-arcsec
